A user’s guide to vacuum technology

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A User's Guide to. Vacuum Technology. Third Edition. John F. O'Hanion. Professor Emeritus of Electrical and Computer Engineering. ' The University ofArizona. O'Hanlon divides the subject of Vacuum into four main sections: Its Basis, Production, Materials, and Systems. It concludes with good Appendixes that, in this vacuum technique only when problems develop with a process or when new equipment purchases become necessary. A User's Guide to Vacuum Technology, s vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, A User's Guide to Vacuum Technology. Second Edition John Wiley & Sons, Inc. by John F. O'Hanlon 1989 481 pgs. ISBN 0-471-81242-0. A User's Guide to Vacuum Technology, 3rd Edition focuses on the operation, understanding, and selection of equipment for processes used in semiconductor,