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I. Start Up. 1. Set up for EDS analysis following the EDS with AZtec procedure in the microscope user manual. 2. Open the AZtec software on the Oxford PC. The option is avail-able for Large Area Mapping, MapQueue, and ordinary mapping for both EBSD and EDS. See Acquire Map Data - Settings on page 500 Automation Additionally, the EDX is controlled by the Oxford Aztec software, and the imaging conditions are set by the microscope control software. Page 3. 1. Microscope AZtecGSR. Find out more · LayerProbe is an exciting software tool for thin film analysis in the SEM. An option for the AZtec EDS microanalysis system,EDS data is viewed and reported together with the EBSD reanalyzed maps. Requires installation of the AZtec software on the individual PCs and on the AZtec integrates AZtecEnergy acquisition and analysis software with Oxford Instruments' X-MaxN and x-act ranges of SDD detectors to create the ultimate