Physical vapour deposition pdf

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PVD and CVD. (Physical Vapor Deposition and Chemical Vapor Deposition). Dong-Il “Dan” Cho g. School of Electrical Engineering and Computer Science, Seoul.Two Major Deposition Techniques : 1. Physical Vapour Deposition (PVD). (a) Evaporation. (b) sputtering. 2. Chemical Vapour Deposition (CVD). Physical vapor deposition (PVD) is referred to PVD techniques can be classified based on the Molecular beam epitaxy (MBE) is a PVD tech-. Physical vapour deposition (PVD) is a process used to produce a metal vapour that can be deposited on electrically conductive materials as a thin, highly Physical Vapor Deposition (PVD). Thermal evaporation. E-beam evaporation. Knudsen cell, Effusion cell. Molecular Beam Epitaxy (MBE). Sputtering. Several methods are currently used for deposition of metal layers. Physical Vapor Deposition techniques (PVD). 1.) Evaporation. 2.) Sputtering. Physical vapor deposition (PVD) systems deposit thin films and coatings by a process in which a target material is vaporized, transported in vacuum, and