Formation of Ge(111) on Insulator by Ge epitaxy on Si(111) and layer transfer
2014.04.30 12:28
“Formation of Ge(111) on Insulator by Ge epitaxy on Si(111) and layer transfer”
K. Sawano, Y. Hoshi, S. Endo, T. Nagashima, K. Arimoto, J. Yamanaka, K. Nakagawa, S. Yamada, K. Hamaya, M. Miyao and Y. Shiraki
Thin Solid Films 557, 76–79 (2014) DOI: https://doi.org/10.1016/j.tsf.2013.10.074(外部サイト)