Suppression of segregation of the phosphorus δ-doping layer in germanium by incorporation of carbon
2016.02.04 12:34
“Suppression of segregation of the phosphorus δ-doping layer in germanium by incorporation of carbon”
Michihiro Yamada, Kentarou Sawano, Masashi Uematsu, Yasuo Shimizu, Koji Inoue, Yasuyoshi Nagai, and Kohei M. Itoh
Japanese Journal of Applied Physics 55, 031304-1~5 (2016). DOI: https://doi.org/10.7567/JJAP.55.031304(外部サイト)