Anisotropic Strain Introduction into Si/Ge Hetero Structures

“Anisotropic Strain Introduction into Si/Ge Hetero Structures”

Kentarou Sawano, Shiori Konoshima, Junji Yamanaka, Keisuke Arimoto, and Kiyokazu Nakagawa

ECS transaction 75, 563-569 (2016) DOI: https://doi.org/10.1149/07508.0563ecst(外部サイト)