Hole generation associated with intrinsic defects in SOI-based SiGe thin films formed by solid-sour…

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“Hole generation associated with intrinsic defects in SOI-based SiGe thin films formed by solid-source molecular beam epitaxy”

Motoki Satoh, Keisuke Arimoto, Junji Yamanaka, Kentarou Sawano, Yasuhiro Shiraki, and Kiyokazu Nakagawa

Journal of Applied Physics 123, 161529 (2018). DOI: /10.1063/1.5004077(外部リンク)